Hirosi Sobukawa, based in Kanagawa, Japan, is a distinguished inventor with a remarkable portfolio of 45 patents. His innovative contributions to the field of electron beam technology have significantly advanced methods in device manufacturing and inspection processes.

Latest Patents

Among Sobukawa's latest inventions is a testing apparatus utilizing charged particles. This apparatus involves irradiating a substrate with primary electrons. The secondary electrons generated from the substrate are subsequently detected, enabling a detailed analysis of electronic components. The technology incorporates a reference die to obtain a pattern matching template image. This image aids in conducting pattern matching with various dies to calculate misalignment angles. The invention’s remarkable feature is its capability to rotate the stage, correcting misalignments to optimize manufacturing processes.

Another of his innovative patents includes an electro-optical inspection apparatus that employs an electron beam. This system captures images by directing a primary electron beam to various sub-visual fields on a sample surface. The detection of secondary electrons provides invaluable information about the sample's properties. This apparatus features unit detectors with advanced optical fibers and scintillators to enhance the precision of the inspection process.

Career Highlights

Hirosi Sobukawa has made substantial contributions to prominent companies such as Ebara Corporation and Toshiba Corporation. His work has been integral to developing cutting-edge technologies in the electronics sector, particularly focused on enhancing manufacturing and inspection techniques.

Collaborations

Throughout his career, Sobukawa has collaborated with notable professionals, including Nobuharu Noji and Tohru Satake. These partnerships have led to groundbreaking advancements and innovations that continue to shape the industry.

Conclusion

Hirosi Sobukawa stands out as a leading figure in the field of electron beam technology, contributing significantly through his numerous patents. His innovative spirit and collaborations with fellow experts underscore the impact of his work in enhancing manufacturing and inspection processes within the electronics industry.

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com