The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Feb. 16, 2012
Nobuharu Noji, Ohta-ku, JP;
Yoshihiko Naito, Ohta-ku, JP;
Hirosi Sobukawa, Ohta-ku, JP;
Kenji Terao, Ohta-ku, JP;
Masahiro Hatakeyama, Ohta-ku, JP;
Katsuya Okumura, Shinjuku-ku, JP;
Nobuharu Noji, Ohta-ku, JP;
Yoshihiko Naito, Ohta-ku, JP;
Hirosi Sobukawa, Ohta-ku, JP;
Kenji Terao, Ohta-ku, JP;
Masahiro Hatakeyama, Ohta-ku, JP;
Katsuya Okumura, Shinjuku-ku, JP;
Ebara Corporation, Tokyo, JP;
Abstract
Provided is a method and an apparatus for inspecting a sample surface with high accuracy. Provided is a method for inspecting a sample surface by using an electron beam method sample surface inspection apparatus, in which an electron beam generated by an electron gun of the electron beam method sample surface inspection apparatus is irradiated onto the sample surface, and secondary electrons emanating from the sample surface are formed into an image toward an electron detection plane of a detector for inspecting the sample surface, the method characterized in that a condition for forming the secondary electrons into an image on a detection plane of the detector is controlled such that a potential in the sample surface varies in dependence on an amount of the electron beam irradiated onto the sample surface.