The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Aug. 08, 2008
Mamoru Nakasuji, Kanagawa, JP;
Nabuharu Noji, Kanagawa, JP;
Tohru Satake, Kanagawa, JP;
Masahiro Hatakeyama, Kanagawa, JP;
Kenji Watanabe, Kanagawa, JP;
Takao Kato, Tokyo, JP;
Hirosi Sobukawa, Kanagawa, JP;
Tsutomu Karimata, Kanagawa, JP;
Shoji Yoshikawa, Tokyo, JP;
Toshifumi Kimba, Kanagawa, JP;
Shin Oowada, Kanagawa, JP;
Mutsumi Saito, Kanagawa, JP;
Muneki Hamashima, Kanagawa, JP;
Mamoru Nakasuji, Kanagawa, JP;
Nabuharu Noji, Kanagawa, JP;
Tohru Satake, Kanagawa, JP;
Masahiro Hatakeyama, Kanagawa, JP;
Kenji Watanabe, Kanagawa, JP;
Takao Kato, Tokyo, JP;
Hirosi Sobukawa, Kanagawa, JP;
Tsutomu Karimata, Kanagawa, JP;
Shoji Yoshikawa, Tokyo, JP;
Toshifumi Kimba, Kanagawa, JP;
Shin Oowada, Kanagawa, JP;
Mutsumi Saito, Kanagawa, JP;
Muneki Hamashima, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.