The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Mar. 22, 2002
Takashi Hiroi, Yokohama, JP;
Maki Tanaka, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Asahiro Kuni, Tokyo, JP;
Yukio Matsuyama, Yokohama, JP;
Yuji Takagi, Yokohama, JP;
Hiroyuki Shinada, Chofu, JP;
Mari Nozoe, Ome, JP;
Aritoshi Sugimoto, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An inspection method and apparatus includes control of an acceleration voltage of an electron beam, irradiation of the electron beam to an object to be inspected mounted on a stage which is continuously moving at least in one direction, and detection of at least one of secondary electrons and reflected electrons emanated from the object in response to the irradiation. An image of the object is obtained from the detected electron by using positional information of the stage and inspection or measurement of the object is conducted using an obtained image. In the detection, an electric field in the vicinity of the object mounted on the stage is controlled so that at least one of the secondary electrons and the reflected electrons emanated from the object in response to the irradiation of the electron beam are decelerated.