Yokohama, Japan

Yukio Matsuyama


Average Co-Inventor Count = 5.1

ph-index = 9

Forward Citations = 386(Granted Patents)


Location History:

  • Tochigi-ken, JP (2001)
  • Nasu-machi, JP (2003)
  • Yokohama, JP (1986 - 2006)

Company Filing History:


Years Active: 1986-2006

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14 patents (USPTO):Explore Patents

Title: Innovations of Yukio Matsuyama

Introduction

Yukio Matsuyama is a prominent inventor based in Yokohama, Japan. He holds a total of 14 patents that showcase his contributions to the field of semiconductor manufacturing and electron beam inspection technologies. His work has significantly advanced the methods used in these industries.

Latest Patents

Matsuyama's latest patents include an electron beam inspection method and apparatus, as well as a semiconductor manufacturing method and its manufacturing line utilizing the same. The inspection method involves controlling the acceleration voltage of an electron beam and irradiating it onto an object mounted on a continuously moving stage. This process allows for the detection of secondary and reflected electrons from the object, enabling the acquisition of images for inspection and measurement. Additionally, the method of detecting defects includes determining image acquisition conditions and processing acquired images to identify defects on the specimen.

Career Highlights

Throughout his career, Yukio Matsuyama has worked with notable companies, including Hitachi, Ltd. His experience in these organizations has contributed to his expertise in semiconductor technologies and electron beam applications.

Collaborations

Matsuyama has collaborated with talented individuals such as Takashi Hiroi and Maki Tanaka, further enhancing his innovative work in the field.

Conclusion

Yukio Matsuyama's contributions to semiconductor manufacturing and electron beam inspection have made a significant impact on the industry. His innovative patents and collaborations reflect his dedication to advancing technology.

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