The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Nov. 10, 1999
Takashi Hiroi, Yokohama, JP;
Maki Tanaka, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Asahiro Kuni, Tokyo, JP;
Yukio Matsuyama, Yokohama, JP;
Yuji Takagi, Yokohama, JP;
Hiroyuki Shinada, Chofu, JP;
Mari Nozoe, Ome, JP;
Aritoshi Sugimoto, Tokyo, JP;
Hitachi. Ltd., Tokyo, JP;
Abstract
An electron beam inspection method including the steps of irradiating an electron beam to an object to be inspected, detecting at least one of a secondary electron and a reflected electron emanated from the object by the irradiation of the electron beam, and obtaining an image of the object from the detected electron. The method further includes the steps of controlling an electric field in a neighborhood of the object for filtering the at least one of the secondary and reflected electron emanated from the object so as to control the contrast of the image, detecting at least one of the secondary and reflected electron emanated from the object which passes through the electric field in the neighborhood of the object by the irradiation of the electron beam, and conducting inspection or measurement of the object on the basis of a detected signal of the detection in the controlled electric field.