The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2001
Filed:
Nov. 10, 1997
Hisae Yamamura, Yokohama, JP;
Yukio Matsuyama, Tochigi-ken, JP;
Toshifumi Honda, Funabashi, JP;
Ludwig Listl, Munich, DE;
Other;
Abstract
A defect judgement processing method and apparatus which can optimize image processing and defect judgement parameters for a detection image cut out by each inspection window to avoid erroneous judgement and defect missing and to realize reliable defect judgement. An image data generator cuts out ranges indicated by a plurality of predesignated inspection windows from a detected image and stores them in a memory, a window data generator generates window data having inspection conditions attached thereto with respect to the plurality of inspection windows and stores them in the memory, a feature extractor reads out detection images of the ranges indicated by the inspection windows from the memory and extracts a structural feature parameter therefrom on the basis of an image processing parameter conforming to the inspection condition obtained by the window data, and a defect judger performs its defect judging operation over the extracted structural feature parameter on the basis of a defect judgement parameter conforming to the inspection condition.