The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Feb. 11, 1998
Ernest Bassous, Bronx, NY (US);
Gobinda Das, Hopewell Junction, NY (US);
Frank Daniel Egitto, Binghamton, NY (US);
Natalie Barbara Feilchenfeld, Jericho, VT (US);
Elizabeth F Foster, Friendsville, PA (US);
Stephen Joseph Fuerniss, Endicott, NY (US);
James Steven Kamperman, Endwell, NY (US);
Donald Joseph Mikalsen, Milford, CT (US);
Michael Roy Scheuermann, Katonah, NY (US);
David Brian Stone, Owego, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. The result of the invention is an array of test probes of preselected uniform topography, which make ohmic contact at all points to be tested simultaneously and nondestructively.