The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2000
Filed:
Apr. 23, 1998
Gregory Breyta, San Jose, CA (US);
Phillip J Brock, Sunnyvale, CA (US);
Daniel J Dawson, San Jose, CA (US);
Ronald A DellaGuardia, Poughkeepsie, NY (US);
Charlotte R DeWan, Beacon, NY (US);
Andrew R Eckert, Fishkill, NY (US);
Hiroshi Ito, San Jose, CA (US);
Premlatha Jagannathan, Patterson, NY (US);
Leo L Linehan, Marlborough, MA (US);
Kathleen H Martinek, Newburgh, NY (US);
Wayne M Moreau, Wappinger, NY (US);
Randolph J Smith, Newburgh, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Several mid UV photo acid generators (PAGs), a chemically amplified photo resist (CAMP), and method for improving nested to isolated line bias are provided. Similarly, photo speed may also be improved. Unlike conventional mid UV PAGs, the present invention's PAG compounds, resist composition, and method do not require a mid UV sensitizer. Specifically, PAGs are provided that bear a chromophore capable of receiving mid UV radiation, particularly I-line, and that are suitable for use in a chemically amplified photo resist having a photo speed of 500 mJ/cm.sup.2 or less, but preferrably 200 mJ/cm.sup.2 or less. For example, the PAGs can be a sulfonium or iodonium salt, such as anthryl, butyl, methyl sulfonium triflate and bis(4-t-butylphenyl)iodonium 9,10-dimethoxyanthracene sulfonate. The chromophore forming a part of the PAGs can be selected from polyaromatic hydrocarbons, for example, chrysenes, pyrenes, fluoranthenes, anthrones, benzophenones, thioxanthones, anthracenes, and phenanthrenes, but preferably anthracenes.