The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2026
Filed:
Aug. 06, 2020
Tokyo Electron Limited, Tokyo, JP;
Shosuke Endo, Nirasaki City, JP;
Yohei Midorikawa, Nirasaki City, JP;
Yohei Nakagomi, Nirasaki City, JP;
Yoshihiro Kobayashi, Nirasaki City, JP;
Yasuo Nakatani, Nirasaki City, JP;
Susumu Saito, Nirasaki City, JP;
Chanseong Ahn, Nirasaki City, JP;
Yuta Takahashi, Nirasaki City, JP;
Takahiro Kijima, Nirasaki City, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A heating/cooling device includes: a chamber; a plurality of substrate holders provided inside the chamber to support substrates; a plurality of LED light sources provided outside the chamber to irradiate the substrates held on the substrate holders with LED light having a wavelength that heats the substrates; a plurality of transmission windows provided between the plurality of substrate holders and the plurality of LED light sources to transmit the LED light radiated from the LED light sources; and a plurality of gas distribution parts provided inside the chamber to distribute and supply a cooling gas to the substrates held on the substrate holders.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile