This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Chanseong Ahn: Inventor in Heating and Cooling Technology.
Introduction
Chanseong Ahn is an inventor associated with Tokyo Electron Limited. His patent work includes a heating and cooling system designed to control substrate temperatures using LED light and cooling gas. The provided information identifies Nirasaki City, Japan, as his location.
Latest Patents
Ahn is associated with 1 patent, titled “Heating/cooling device and heating/cooling method.” The invention describes a chamber containing multiple substrate holders, with LED light sources positioned outside the chamber to heat the supported substrates. Transmission windows allow the light to pass into the chamber, while gas distribution parts supply cooling gas to the substrates. Together, these components provide a system for heating and cooling substrates.
Career Highlights
Ahn’s listed patent reflects work on thermal control technology for substrate processing. The design combines LED-based heating with gas-based cooling in a chamber-based apparatus.
Collaborations
Ahn’s listed coworkers include Yohei Nakagomi and Yasuo Nakatani. The provided information does not specify their roles in the patent or their particular contributions.
Conclusion
Chanseong Ahn’s patent describes an integrated approach to substrate temperature control, combining LED heating and cooling-gas distribution.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile