This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yohei Nakagomi: Inventor of a Heating and Cooling Device
Introduction
Yohei Nakagomi is an inventor based in Nirasaki City, Japan, and works at Tokyo Electron Limited. His patent work addresses equipment for heating and cooling substrates.
Latest Patents
Nakagomi is named on 1 patent: “Heating/cooling device and heating/cooling method.” The invention describes a chamber containing multiple substrate holders, with LED light sources outside the chamber that irradiate the substrates through transmission windows. Gas distribution parts inside the chamber supply cooling gas to the substrates, enabling the device to combine LED-based heating with gas-based cooling.
Career Highlights
Nakagomi’s listed invention concerns substrate-processing equipment, an area relevant to Tokyo Electron Limited’s work in semiconductor manufacturing technology.
Collaborations
Yoshihiro Kobayashi and Takahiro Kijima are identified as Nakagomi’s coworkers.
Conclusion
Yohei Nakagomi’s patent presents an approach to substrate temperature control that combines LED heating and cooling-gas distribution.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile