This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Takahiro Kijima: Inventor in Heating and Cooling Technology.
Introduction
Takahiro Kijima is an inventor based in Nirasaki, Japan, and is associated with Tokyo Electron Limited. His patent work includes a heating and cooling system designed to control substrate temperatures.
Latest Patents
Kijima is named on 1 patent: “Heating/cooling device and heating/cooling method.” The invention describes a chamber containing multiple substrate holders, with LED light sources outside the chamber that irradiate the substrates through transmission windows. Gas distribution parts inside the chamber supply cooling gas to the substrates, enabling the device to heat and cool them.
Career Highlights
Kijima’s listed invention addresses temperature management for substrates through a combination of LED heating and gas-based cooling. His work is associated with Tokyo Electron Limited.
Collaborations
Kijima’s listed coworkers include Susumu Saito and Yohei Midorikawa.
Conclusion
Takahiro Kijima’s patent reflects an approach to substrate temperature control that combines LED heating with cooling-gas distribution.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile