This inventor holds 1 USPTO granted patent. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Yoshihiro Kobayashi: Inventor of a Heating and Cooling Device
Introduction
Yoshihiro Kobayashi is an inventor based in Nirasaki City, Japan. He is associated with Tokyo Electron Limited and is named on one patent.
Latest Patents
Kobayashi’s patent, “Heating/cooling device and heating/cooling method,” describes a system for heating and cooling substrates inside a chamber. LED light sources outside the chamber direct heat-producing light through transmission windows toward substrates held inside. Gas distribution parts supply cooling gas to the substrates, enabling the device to combine LED-based heating with gas cooling.
Career Highlights
Kobayashi’s recorded patent work concerns substrate-processing equipment, an area relevant to semiconductor manufacturing. His invention brings together substrate holders, LED light sources, optical transmission windows, and cooling-gas distribution components in one system.
Collaborations
The patent information associates Kobayashi with Tokyo Electron Limited. The available details do not specify additional collaborators.
Conclusion
Yoshihiro Kobayashi’s patent presents an integrated approach to substrate heating and cooling, combining LED irradiation with controlled gas delivery.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile