The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Jul. 28, 2023
Asml Netherlands B.v., Veldhoven, NL;
Maxim Aleksandrovich Nasalevich, Eindhoven, NL;
Erik Achilles Abegg, Eindhoven, NL;
Nirupam Banerjee, Eindhoven, NL;
Michiel Alexander Blauw, Breda, NL;
Derk Servatius Gertruda Brouns, Herentals, BE;
Paul Janssen, Eindhoven, NL;
Matthias Kruizinga, Herten, NL;
Egbert Lenderink, Waalre, NL;
Nicolae Maxim, Eindhoven, NL;
Andrey Nikipelov, Eindhoven, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Claudia Piliego, Eindhoven, NL;
Mária Péter, Eindhoven, NL;
Gijsbert Rispens, Eersel, NL;
Nadja Schuh, Eindhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Willem Joan Van Der Zande, Bussum, NL;
Pieter-Jan Van Zwol, Eindhoven, NL;
Antonius Willem Verburg, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;
David Ferdinand Vles, Eindhoven, NL;
Willem-Pieter Voorthuijzen, 's-Hertogenbosch, NL;
Aleksandar Nikolov Zdravkov, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
Membranes for EUV lithography are disclosed. In one arrangement, a membrane has a stack having layers in the following order: a first capping layer including an oxide of a first metal; a base layer including a compound having a second metal and an additional element selected from the group consisting of Si, B, C and N; and a second capping layer including an oxide of a third metal, wherein the first metal is different from the second metal and the third metal is the same as or different from the first metal.