The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2025
Filed:
Jul. 16, 2020
Asml Netherlands B.v., Veldhoven, NL;
István Nagy, Eindhoven, NL;
Özer Duman, Eindhoven, NL;
Arjan Gijsbertsen, Vught, NL;
Pieter Jacob Heres, Veldhoven, NL;
Rudolf Michiel Hermans, Eindhoven, NL;
Erik Jansen, Eindhoven, NL;
Thomas Augustus Mattaar, Veldhoven, NL;
Norbertus Josephus Martinus Van Den Nieuwelaar, Tilburg, NL;
Petrus Franciscus Van Gils, Rijen, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of determining a mark measurement sequence for an object comprising a plurality of marks, the method including: receiving location data for the plurality of marks that are to be measured; obtaining a boundary model of a positioning device used for performing the mark measurement sequence; and determining the mark measurement sequence based on the location data and the boundary model.