The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2024

Filed:

Jul. 28, 2023
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Wensen Hung, Zhubei, TW;

Tsung-Yu Chen, Hsinchu, TW;

Tsung-Shu Lin, New Taipei, TW;

Chen-Hsiang Lao, New Taipei, TW;

Wen-Hsin Wei, Hsinchu, TW;

Hsien-Pin Hu, Zhubei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 21/67 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/367 (2006.01); H01L 23/40 (2006.01); H01L 23/498 (2006.01); H01L 25/065 (2023.01);
U.S. Cl.
CPC ...
H01L 23/3675 (2013.01); H01L 21/4853 (2013.01); H01L 21/486 (2013.01); H01L 21/4878 (2013.01); H01L 21/4882 (2013.01); H01L 21/563 (2013.01); H01L 21/67092 (2013.01); H01L 23/3185 (2013.01); H01L 23/40 (2013.01); H01L 23/49827 (2013.01); H01L 23/562 (2013.01); H01L 24/16 (2013.01); H01L 25/0655 (2013.01); H01L 2224/16225 (2013.01);
Abstract

An apparatus for manufacturing packaged semiconductor devices includes a lower plate having package platforms and clamp guide pins to align an upper plate with the lower plate, and a boat tray having windows configured to receive package devices, and a plurality of upper plates configured to be aligned to respective windows and respective package platforms. Clamping force can be applied by fasteners configured to generate a downward force upon the upper plate. Package devices on the platforms are thus subjected to a clamping force. Load cells measure the clamping force so adjustments can be made.


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