The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2024

Filed:

Apr. 27, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Hsuan-Ting Kuo, Taichung, TW;

Ching-Hua Hsieh, Hsinchu, TW;

Cheng-Ting Chen, Taichung, TW;

Hsiu-Jen Lin, Hsinchu County, TW;

Hao-Jan Pei, Hsinchu, TW;

Yu-Peng Tsai, Taipei, TW;

Chia-Lun Chang, Tainan, TW;

Chih-Chiang Tsao, Taoyuan, TW;

Philip Yu-Shuan Chung, Taipei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 25/10 (2006.01); H01L 21/56 (2006.01); H01L 21/683 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/522 (2006.01); H01L 25/00 (2006.01); H01L 27/06 (2006.01);
U.S. Cl.
CPC ...
H01L 25/50 (2013.01); H01L 21/56 (2013.01); H01L 21/6836 (2013.01); H01L 21/76871 (2013.01); H01L 23/3128 (2013.01); H01L 23/5226 (2013.01); H01L 24/17 (2013.01); H01L 24/33 (2013.01); H01L 27/0688 (2013.01); H01L 2224/02372 (2013.01); H01L 2224/02373 (2013.01);
Abstract

A manufacturing method of a package-on-package structure includes at least the following steps. Top packages are mounted on a top side of a reconstructed wafer over a flexible tape, where conductive bumps at a bottom side of the reconstructed wafer is attached to the flexible tape, and during the mounting, a shape geometry of the respective conductive bump changes and at least a lower portion of the respective conductive bump is embraced by the flexible tape. The flexible tape is released from the conductive bumps after the mounting.


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