The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2024
Filed:
Jun. 26, 2018
Asml Netherlands B.v., Veldhoven, NL;
Evgenia Kurganova, Nijmegen, NL;
Adrianus Johannes Maria Giesbers, Vlijmen, NL;
Maxim Aleksandrovich Nasalevich, Eindhoven, NL;
Arnoud Willem Notenboom, Rosmalen, NL;
Mária Péter, Eindhoven, NL;
Pieter-Jan Van Zwol, Eindhoven, NL;
David Ferdinand Vles, Eindhoven, NL;
Willem-Pieter Voorthuijzen, 's-Hertogenbosch, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of manufacturing a pellicle for a lithographic apparatus, the method including locally heating the pellicle using radiative heating, and depositing coating material simultaneously on both sides of the pellicle, and pellicles manufactured according to this method. Also disclosed is the use of a multilayer graphene pellicle with a double-sided hexagonal boron nitride coating in a lithographic apparatus.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile