The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2022
Filed:
Oct. 01, 2020
Pdf Solutions, Inc., Santa Clara, CA (US);
Indranil De, Alameda, CA (US);
Marian Mankos, San Jose, CA (US);
Dennis Ciplickas, San Jose, CA (US);
Christopher Hess, Belmont, CA (US);
Jeremy Cheng, San Jose, CA (US);
Balasubramanian Murugan, San Ramon, CA (US);
Qi Hu, Cypress, CA (US);
PDF SOLUTIONS, INC., Santa Clara, CA (US);
Abstract
Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.