The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Mar. 04, 2019
Applicant:

Yangtze Memory Technologies Co., Ltd., Wuhan, CN;

Inventors:

Zongliang Huo, Wuhan, CN;

Jun Liu, Wuhan, CN;

Jifeng Zhu, Wuhan, CN;

Jun Chen, Wuhan, CN;

Zi Qun Hua, Wuhan, CN;

Li Hong Xiao, Wuhan, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/52 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 25/00 (2006.01); H01L 21/768 (2006.01); H01L 23/538 (2006.01); H01L 27/11582 (2017.01); H01L 27/1157 (2017.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 24/19 (2013.01); H01L 21/76802 (2013.01); H01L 23/5384 (2013.01); H01L 23/53238 (2013.01); H01L 24/20 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 27/1157 (2013.01); H01L 27/11582 (2013.01);
Abstract

Embodiments of bonded semiconductor structures and fabrication methods thereof are disclosed. In an example, a semiconductor device includes a first semiconductor structure, a second semiconductor structure, and a bonding interface between the first semiconductor structure and the second semiconductor structure. The first semiconductor structure includes a substrate, a first device layer disposed on the substrate, and a first bonding layer disposed above the first device layer and including a first bonding contact. The second semiconductor structure includes a second device layer and a second bonding layer disposed below the second device layer and including a second bonding contact. The first bonding contact is in contact with the second bonding contact at the bonding interface. At least one of the first bonding contact or the second bonding contact is made of an indiffusible conductive material.


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