The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2020
Filed:
Jul. 10, 2019
Asml Netherlands B.v., Veldhoven, NL;
Kaustuve Bhattacharyya, Veldhoven, NL;
Henricus Wilhelmus Maria Van Buel, 's-Hertogenbosch, NL;
Christophe David Fouquet, Retie, BE;
Hendrik Jan Hidde Smilde, Veldhoven, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Richard Johannes Franciscus Van Haren, Waalre, NL;
Xing Lan Liu, Veldhoven, NL;
Johannes Marcus Maria Beltman, Knegsel, NL;
Andreas Fuchs, Meerbusch, DE;
Omer Abubaker Omer Adam, Eindhoven, NL;
Michael Kubis, Meerbusch, DE;
Martin Jacobus Johan Jak, 's-Hertogenbosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A diffraction measurement target that has at least a first sub-target and at least a second sub-target, and wherein (1) the first and second sub-targets each include a pair of periodic structures and the first sub-target has a different design than the second sub-target, the different design including the first sub-target periodic structures having a different pitch, feature width, space width, and/or segmentation than the second sub-target periodic structure or (2) the first and second sub-targets respectively include a first and second periodic structure in a first layer, and a third periodic structure is located at least partly underneath the first periodic structure in a second layer under the first layer and there being no periodic structure underneath the second periodic structure in the second layer, and a fourth periodic structure is located at least partly underneath the second periodic structure in a third layer under the second layer.