The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2019
Filed:
Mar. 19, 2012
Bastian Marten Noller, Lorsch, DE;
Yuzhuo LI, Mannheim, DE;
Diana Franz, Schifferstadt, DE;
Kenneth Rushing, Paw paw, MI (US);
Michael Lauter, Mannheim, DE;
Daniel Kwo-hung Shen, Junghe, TW;
Yongqing Lan, Potsdam, NY (US);
Zhenyu Bao, Potsdam, NY (US);
Bastian Marten Noller, Lorsch, DE;
Yuzhuo Li, Mannheim, DE;
Diana Franz, Schifferstadt, DE;
Kenneth Rushing, Paw paw, MI (US);
Michael Lauter, Mannheim, DE;
Daniel Kwo-Hung Shen, Junghe, TW;
Yongqing Lan, Potsdam, NY (US);
Zhenyu Bao, Potsdam, NY (US);
BASF SE, Ludwigshafen, DE;
Abstract
A chemical-mechanical polishing (CMP) composition comprising (A) inorganic particles, organic particles, or a composite or mixture thereof, (B) a polymeric polyamine or a salt thereof comprising at least one type of pendant group (Y) which comprises at least one moiety (Z), wherein (Z) is a carboxylate (—COOR), sulfonate (—SOR), sulfate (—O—SOR), phosphonate (—P(═O)(OR)(OR)), phosphate (—O—P(═O)(OR)(OR)), carboxylic acid (—COOH), sulfonic acid (—SOH), sulfuric acid (—O—SO—), phosphonic acid (—P(═O)(OH)), phosphoric acid (—O—P(═O)(OH)) moiety, or their deprotonated forms, Ris alkyl, aryl, alkylaryl, or arylalkyl Ris alkyl, aryl, alkylaryl, or arylalkyl, Ris alkyl, aryl, alkylaryl, or arylalkyl, Ris alkyl, aryl, alkylaryl, or arylalkyl, Ris H, alkyl, aryl, alkylaryl, or arylalkyl, Ris alkyl, aryl, alkylaryl, or arylalkyl, Ris H, alkyl, aryl, alkylaryl, or arylalkyl, and (C) an aqueous medium.