The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2019
Filed:
Dec. 26, 2014
Kla-tencor Corporation, Milpitas, CA (US);
Noam Sapiens, Bat Yam, IL;
Joel Seligson, Misgav, IL;
Vladimir Levinski, Migdal HaEmek, IL;
Daniel Kandel, Aseret, IL;
Yoel Feler, Haifa, IL;
Barak Bringoltz, Rishon LeTzion, IL;
Amnon Manassen, Haifa, IL;
Eliav Benisty, Migdal Ha'emek, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Metrology systems and methods are provided herein, which comprise an optical element that is positioned between an objective lens of the system and a target. The optical element is arranged to enhance evanescent modes of radiation reflected by the target. Various configurations are disclosed: the optical element may comprise a solid immersion lens, a combination of Moiré-elements and solid immersion optics, dielectric-metal-dielectric stacks of different designs, and resonating elements to amplify the evanescent modes of illuminating radiation. The metrology systems and methods are configurable to various metrology types, including imaging and scatterometry methods.