Zonghui Su

Title: Zonghui Su: Innovator in Substrate Processing Technologies

Introduction

Zonghui Su is a notable inventor based in San Jose, CA, who has made significant contributions to the field of substrate processing technologies. With a total of 3 patents to his name, he has developed innovative methods that enhance the efficiency and effectiveness of various processing techniques.

Latest Patents

One of Zonghui Su's latest patents is focused on bevel etch profile control. This method involves processing a substrate by placing it on a cover plate within a processing chamber. The substrate, which has a center and a bevel edge, contains a dielectric layer. The process includes heating the substrate, raising an edge ring to contact a mask, and flowing a process gas containing an etchant to produce a plasma that exposes the upper surface of the substrate at the bevel edge.

Another significant patent addresses critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components. This implementation involves placing a test substrate on a support inside a processing chamber and adjusting a component, such as a mask, based on the particle distribution observed on the substrate. The process is repeated until a uniform particle distribution is achieved.

Career Highlights

Zonghui Su is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work focuses on advancing technologies that improve substrate processing, which is crucial for the manufacturing of electronic devices.

Collaborations

Zonghui has collaborated with several talented individuals in his field, including Vinay K Prabhakar and Abdul Aziz Khaja. These collaborations have contributed to the development of innovative solutions in substrate processing.

Conclusion

Zonghui Su's contributions to substrate processing technologies through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing.