Zhaoxu Shen

Title: Zhaoxu Shen: Innovator in Semiconductor Technology

Introduction

Zhaoxu Shen is a prominent inventor based in Shanghai, China, known for his contributions to semiconductor technology. With a total of 5 patents, he has made significant advancements in the field, particularly in the fabrication of vertical transistors.

Latest Patents

One of his latest patents is titled "Method for Fabricating Vertical Transistor Having a Silicided Bottom." This patent describes a method of manufacturing a semiconductor device that includes providing a substrate structure with a semiconductor column vertically protruding from the substrate. The process involves forming protective layers, etching, and removing portions of these layers to expose the semiconductor column. The method ensures that the first contact material layer in contact with the lower portion of the semiconductor column does not increase the source series resistance. Another related patent is "Vertical Transistor Having a Silicided Bottom and Method for Fabricating Thereof," which outlines a similar manufacturing process with the same focus on minimizing resistance.

Career Highlights

Zhaoxu Shen has worked with notable companies in the semiconductor industry, including Semiconductor Manufacturing International Corporation in Shanghai and Beijing. His experience in these organizations has allowed him to refine his skills and contribute to innovative semiconductor solutions.

Collaborations

Throughout his career, Zhaoxu has collaborated with talented individuals such as Duohui Bei and Jianhua Ju. These partnerships have fostered a creative environment that has led to significant advancements in semiconductor technology.

Conclusion

Zhaoxu Shen's work in semiconductor technology, particularly in the fabrication of vertical transistors, showcases his innovative spirit and dedication to advancing the field. His contributions continue to influence the industry and inspire future developments.