Zaifeng Tang

Title: Innovations of Zaifeng Tang in Semiconductor Manufacturing

Introduction

Zaifeng Tang is a prominent inventor based in Shanghai, China, known for his contributions to semiconductor manufacturing. With a total of six patents to his name, Tang has made significant advancements in the field, particularly in methods that enhance the efficiency and reliability of semiconductor processes.

Latest Patents

One of Tang's latest patents is a method for manufacturing shallow trench isolation. This innovative method involves a two-step etching process on a semiconductor substrate. The first step utilizes a dry etching process to form the shallow trench, during which metal ions are released and deposited on the trench's inner surface, creating a contamination layer. The second step employs a wet etching process to remove this contamination layer, ensuring a cleaner and more effective manufacturing process.

Another notable patent is related to a wafer transfer module designed for semiconductor manufacturing machines. This module features two sets of transmitter/receivers on its sidewalls to monitor the travel position of an elevator and the position of a transfer arm. By transmitting signals to a control system, the module can prevent wafer scratches caused by deviations in the positions of the elevator or transfer arm, thereby enhancing the reliability of the manufacturing process.

Career Highlights

Zaifeng Tang has worked with notable companies in the semiconductor industry, including Shanghai Huali Microelectronics Corporation and Shanghai Huali Integrated Circuit Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to the advancement of semiconductor technology.

Collaborations

Throughout his career, Tang has collaborated with talented individuals such as Yu Ren and Yukun Lv. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the semiconductor field.

Conclusion

Zaifeng Tang's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his significant role in advancing technology in this critical industry. His work continues to influence the efficiency and reliability of semiconductor processes, making a lasting impact on the field.