The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2024
Filed:
Oct. 03, 2022
Applicant:
Shanghai Huali Microelectronics Corporation, Shanghai, CN;
Inventors:
Assignee:
Shanghai Huali Microelectronics Corporation, Shanghai, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 5/00 (2006.01); H01L 21/67 (2006.01); B08B 9/08 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B08B 5/00 (2013.01); B08B 9/08 (2013.01); H01L 21/67069 (2013.01); H01L 21/6831 (2013.01); B08B 2209/08 (2013.01);
Abstract
The present application discloses a preventive maintenance method for a chamber of a metal etching machine. An optimized burning cleaning recipe is added before the chamber is opened, and metal substances remaining on the surface of an electrostatic chuck are removed by adopting a cleaning/pumping down multi-step alternate method. Before the chamber is opened for preventive maintenance, the phenomenon of metal particles remaining on the surface of the electrostatic chuck can be significantly improved, thus solving the downtime problem caused by abnormal backside helium and ensuring the stability of mass production.