Company Filing History:
Years Active: 2020-2025
Title: Innovations by Yuya Minoura
Introduction
Yuya Minoura is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 6 patents. His work focuses on improving the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
One of his latest patents is a method of performing maintenance on a substrate processing apparatus. This method involves supplying a first processing gas to form a protective film on a surface within the chamber, followed by exposing the chamber to the ambient environment for maintenance. Another notable patent is a plasma processing method, which includes coating the surfaces of components inside a chamber with a conductive film and processing a substrate by turning a second gas into plasma.
Career Highlights
Yuya Minoura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative approaches have contributed to advancements in substrate processing technologies.
Collaborations
He has collaborated with notable coworkers, including Taku Gohira and Michiko Nakaya, to further enhance the development of substrate processing methods.
Conclusion
Yuya Minoura's contributions to substrate processing through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.