Company Filing History:
Years Active: 1991-2001
Title: Yutaka Yamahira: Innovator in Substrate Processing Technology
Introduction
Yutaka Yamahira is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of three patents. His work focuses on improving efficiency and reducing power consumption in various apparatuses.
Latest Patents
One of his latest patents is a "Substitute processing apparatus with power distribution control for reduced power consumption during apparatus start up." This invention involves a substrate processing apparatus designed for coating resist onto a substrate and developing the coated resist. It features a power supply equipped with a main switch that is controlled in an ON/OFF manner. The apparatus includes multiple electric appliances that operate similarly when power is supplied. A power distribution circuit supplies power to these appliances, while a control section manages the power-supply timing, staggering it to reduce initial power consumption.
Another significant patent is the "Apparatus and method for washing substrates." This invention comprises a substrates-cleaning apparatus that includes a first unit with a scrubber for cleaning one side of a substrate. It also features a second unit with a turning mechanism to flip the substrate and a carrier robot that transports the substrate between the two units.
Career Highlights
Yutaka Yamahira has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His experience in these organizations has allowed him to develop innovative solutions that address industry challenges.
Collaborations
Throughout his career, Yamahira has collaborated with talented individuals such as Michiaki Matsushita and Masashi Moriyama. These partnerships have contributed to the advancement of substrate processing technologies.
Conclusion
Yutaka Yamahira's contributions to substrate processing technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative solutions continue to impact the industry positively.
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