The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2001
Filed:
Oct. 19, 1998
Applicant:
Inventor:
Yutaka Yamahira, Kumamoto, JP;
Assignee:
Tokyo Electric Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 1/132 ; H05B 1/02 ;
U.S. Cl.
CPC ...
G05B 1/132 ; H05B 1/02 ;
Abstract
A substrate processing apparatus for coating resist onto a substrate and developing the coated resist, comprising a power supply equipped with a main switch controlled in an ON/OFF manner, a plurality of electric appliances operated substantially in the same manner when power is supplied from the power supply, a power distribution circuit for supplying power to each of the plurality of electric appliances, and a control section connected to the power distribution circuit, for controlling power-supply timing to the plurality of electric appliances. The control section staggers power-supply timing to each of the electric appliances when the main switch is turned on.