Yutaka Matsui is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the fields of gas measurement and plasma processing, holding a total of 7 patents. His innovative work has advanced technologies that are crucial in various industrial applications.

Latest Patents

Matsui's latest patents include a gas temperature measurement method and a gas introduction system. This method involves measuring the temperature of a gas in a line connected to a gas supply source and a decompressor. The line is divided by multiple valves, allowing for precise measurement of pressure rise rates to calculate gas temperature. Another notable patent is for a plasma processing apparatus, which enables the removal of polymer from an electrically insulated electrode. This apparatus features a substrate processing chamber and utilizes a radio frequency power source to enhance processing efficiency.

Career Highlights

Yutaka Matsui has built a successful career at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His work has not only contributed to the company's reputation but has also pushed the boundaries of technology in gas measurement and plasma processing.

Collaborations

Matsui has collaborated with notable coworkers, including Masanobu Honda and Manabu Sato. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Yutaka Matsui's contributions to gas measurement and plasma processing exemplify the spirit of innovation. His patents reflect a commitment to advancing technology and improving industrial processes.

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