Location History:
- Kudamatsu, JP (1983 - 1984)
- Hikari, JP (1986 - 2001)
Company Filing History:
Years Active: 1983-2001
Title: Yutaka Kakehi: Innovator in Plasma Processing Technology
Introduction
Yutaka Kakehi is a prominent inventor based in Hikari, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 17 patents. His work focuses on enhancing the performance and efficiency of various plasma applications.
Latest Patents
Kakehi's latest patents include an innovative apparatus for treating samples. This post-etch treatment method is capable of imparting high corrosion prevention performance to aluminum-containing wiring films. The process involves treating etched aluminum-containing wiring material with plasma from a gas that contains oxygen. This treatment effectively removes the resist formed on the aluminum material by reacting it with oxygen. Additionally, Kakehi has developed a plasma generator with mode restricting means. This apparatus features a waveguide that allows for the propagation of microwaves to a plasma-forming region, improving the uniformity and stability of the plasma through a mode restrictor.
Career Highlights
Kakehi is associated with Hitachi, Ltd., where he has been instrumental in advancing plasma processing technologies. His innovative approaches have led to significant improvements in the performance of plasma applications, making him a key figure in his field.
Collaborations
Throughout his career, Kakehi has collaborated with notable colleagues, including Makoto Nawata and Ryooji Fukuyama. These collaborations have further enriched his research and development efforts.
Conclusion
Yutaka Kakehi's contributions to plasma processing technology have established him as a leading inventor in his field. His innovative patents and collaborations continue to influence advancements in technology.