The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 1986
Filed:
Nov. 28, 1984
Yutaka Kakehi, Hikari, JP;
Norio Nakazato, Kudamatsu, JP;
Yoshimasa Fukushima, Hikari, JP;
Kousai Hiratsuka, Kudamatsu, JP;
Fumio Shibata, Kudamatsu, JP;
Noriaki Yamamoto, Kudamatsu, JP;
Tsunehiko Tsubone, Kudamatsu, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.