This inventor holds 4 USPTO granted patents. Top assignees: Globalfoundries Inc., International Business Machines Corporation. Active years: 2014-2021.
Company Filing History:


Years Active: 2014-2021
Title: Innovations of Inventor Yunlin Zhang
Introduction
Yunlin Zhang is a notable inventor based in Wappingers Falls, NY (US). He has made significant contributions to the field of semiconductor metrology, holding a total of 4 patents. His work focuses on improving measurement techniques and assessing non-uniformity in semiconductor structures.
Latest Patents
One of his latest patents is titled "Method for quantification of process non-uniformity using model-based metrology." This invention provides an improved method and system for assessing non-uniformity of features in the measurement area on a semiconductor structure, such as a non-uniform film thickness. The scattering from non-uniform features is modeled, and post-processing of the residual of theoretical and collected spectra is performed to assess a measure of non-uniformity from within an incident spot beam of a spectrum acquisition tool.
Another significant patent is "Measuring semiconductor device features using stepwise optical metrology." This invention relates to an apparatus and method of measuring multiple parameters of a structure or feature of a semiconductor device using a combination of stepwise optical metrology and a linear system of equations. In this method, a light beam is shined on different areas of the semiconductor device to calculate averages, which are then used to determine an overall average.
Career Highlights
Yunlin Zhang has worked with prominent companies in the technology sector, including IBM and Globalfoundries Inc. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor measurement.
Collaborations
Throughout his career, Yunlin has collaborated with notable professionals in the field, including Nedal R Saleh and Narender N Rana. These collaborations have contributed to the advancement of his research and inventions.
Conclusion
Yunlin Zhang's contributions to semiconductor metrology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the way semiconductor features are measured and assessed.