Yung-Mao Hsu

Title: Yung-Mao Hsu: Innovator in Semiconductor Processing Technologies

Introduction

Yung-Mao Hsu is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 4 patents. His innovative work focuses on enhancing the safety and efficiency of gas flow control systems used in semiconductor manufacturing.

Latest Patents

One of Hsu's latest patents is a gas flow control system with an interlock feature. This system is designed to control the flow of gases into a reaction chamber, which is crucial for processing semiconductor devices. The safety interlock prevents the inadvertent mixing of incompatible, reactive gases. The interlock feature is implemented through a control circuit that operates a valve system, allowing for the individual control of gas flows. This design includes a series of relay switches and timers that create a time delay between the initiation of gas flows from separate sources.

Another notable patent is the method and apparatus for early detection of material accretion and peeling in plasma systems. This invention utilizes multiple optical sensors positioned within a plasma process chamber. These sensors monitor the gas distribution plate or other surfaces inside the chamber. When asymmetries in brightness or light reflection are detected, indicating potential material coating or contaminant dislodging, a signal is sent to a central process controller. This controller can terminate the plasma process and alert operating personnel, ensuring the integrity of the manufacturing process.

Career Highlights

Yung-Mao Hsu is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that improve the safety and reliability of semiconductor manufacturing processes.

Collaborations

Hsu has collaborated with notable colleagues, including Jeng-Chiang Chuang and Chih-Pen Yen. These partnerships have fostered innovation and contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Yung-Mao Hsu's contributions to semiconductor processing technologies through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence the safety and efficiency of semiconductor manufacturing processes.