Yung-Chih Chang

Title: Yung-Chih Chang: Innovator in Mask Storage Technology

Introduction

Yung-Chih Chang is a notable inventor based in Zhutian, Taiwan. He has made significant contributions to the field of mask storage technology, particularly in the semiconductor industry. With a total of 4 patents to his name, Chang's innovations are aimed at enhancing the efficiency and reliability of lithography processes.

Latest Patents

One of Chang's latest patents is a "Mask storage device for mask haze prevention." This device is designed to store masks used in lithography and includes a desiccant retainer that holds a desiccant, which is crucial for preventing moisture-related defects. The device features a first and second shell that form a sealed space when closed, ensuring that the desiccant remains effective. Additionally, the device incorporates a gasket that creates an airtight seal, further protecting the mask from environmental factors. Another related patent is the "Mask storage device for mask haze prevention and methods thereof," which outlines a method for preventing defect formation on a mask by utilizing a similar storage device.

Career Highlights

Yung-Chih Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on developing innovative solutions that address challenges in mask storage and lithography processes. His contributions have been instrumental in advancing the technology used in semiconductor manufacturing.

Collaborations

Chang has collaborated with notable colleagues, including Chih-Wing Chang and Kai-Hsiung Chen. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the field.

Conclusion

Yung-Chih Chang's work in mask storage technology exemplifies the importance of innovation in the semiconductor industry. His patents not only address critical issues but also pave the way for future advancements in lithography processes.