This inventor holds 13 USPTO granted patents. Top assignee: Canon Kabushiki Kaisha. Active years: 1989-2006.
Location History:
- Yokohama, JP (1989 - 1996)
- Tokyo, JP (1998 - 2006)
Company Filing History:
Years Active: 1989-2006
Title: Yukio Yamane: Innovator in Exposure Technology
Introduction
Yukio Yamane is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of exposure technology, particularly in the development of advanced exposure apparatuses. With a total of 13 patents to his name, his work has had a substantial impact on the industry.
Latest Patents
Yukio Yamane's latest patents include an innovative exposure apparatus and a method for cleaning the optical element of the same. This exposure apparatus is designed to expose a substrate to a pattern of a mask using exposure light. It features an optical system that directs the exposure light from a light source to the substrate. The apparatus includes a first casing that accommodates the optical surface of the optical element and a second casing that houses both the optical element and the first casing. Additionally, it has ports for supplying inert gas into both casings, enhancing the cleaning process of the optical element.
Another notable patent involves an exposure apparatus that includes a light source emitting an exposure beam and an optical system with a closed casing. This system is equipped with a first supplier that introduces inert gas into the closed space and a second supplier that can introduce either oxygen or clean air. A controller is also included to change the wavelength of the exposure beam between the substrate exposure and the cleaning of the optical element.
Career Highlights
Yukio Yamane is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to push the boundaries of exposure technology, contributing to the company's reputation for innovation and quality.
Collaborations
Yukio has collaborated with notable coworkers such as Tomoharu Hase and Yoshinori Miwa. Their combined expertise has fostered a creative environment that has led to groundbreaking advancements in their field.
Conclusion
Yukio Yamane's contributions to exposure technology through his patents and work at Canon Kabushiki Kaisha highlight his role as a key innovator in the industry. His inventions continue to influence the development of advanced optical systems.