The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2001
Filed:
Feb. 12, 1999
Applicant:
Inventors:
Yoshinori Miwa, Utsunomiya, JP;
Yukio Yamane, Tokyo, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ;
U.S. Cl.
CPC ...
G03B 2/742 ;
Abstract
An exposure apparatus includes an illumination system including an optical element and an inside movable portion, and a driving mechanism for driving the movable portion. The driving mechanism includes at least one of a non-contact type bearing and a non-contact type motor. The illumination system can be placed in a predetermined gas ambience, while the movable portion can be placed in the same gas ambience.