Company Filing History:

4 out of 10,295

Tokyo Electron Limited

patents

Years Active: 2010-2018

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10112210 - Coating processing apparatus for coating liquid on substrate moving in a horizontal direction with slit-shaped ejecting port moving in a vertical direction (2018-10-30),

2. 9623435 - Substrate processing apparatus for coating liquid composed of first coating liquid and second coating liquid on substrate with slit-shaped ejection port (2017-04-18),

3. 8192796 - Substrate processing apparatus and substrate processing method (2012-06-05),

4. 7757626 - Substrate processing apparatus and substrate processing method (2010-07-20),

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.

For the Inventor, By the Inventor

Yukihiro Wakamoto

Location History:

Company Filing History:

Years Active: 2010-2018