Tokyo, Japan

Yukihiro Fukusumi

USPTO Granted Patents = 10 

Average Co-Inventor Count = 4.6

ph-index = 1

Forward Citations = 7(Granted Patents)


Company Filing History:


Years Active: 2008-2025

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10 patents (USPTO):Explore Patents

Title: Biography of Yukihiro Fukusumi

Introduction: Yukihiro Fukusumi is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 10 patents. His innovative work focuses on improving efficiency and reducing power consumption in manufacturing processes.

Latest Patents: One of his latest inventions is the subfab area installation apparatus. This apparatus is designed to reduce power consumption during semiconductor manufacturing. It includes a vacuum pump for evacuating processing gas, a cooling unit for cooling circulation liquids, a heating unit for heating other circulation liquids, and an abatement device for detoxifying the processing gas. The cooling-liquid line is engineered to efficiently manage the flow of cooling liquid through various components.

Career Highlights: Yukihiro has worked with notable companies such as Ebara Corporation and Ebara Refrigeration Equipment & Systems Co., Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.

Collaborations: Throughout his career, Yukihiro has collaborated with talented individuals, including Naoyuki Inoue and Kiichi Irie. These partnerships have contributed to the advancement of his projects and the successful implementation of his inventions.

Conclusion: Yukihiro Fukusumi's work in the semiconductor industry exemplifies the spirit of innovation. His patents and collaborations reflect his commitment to enhancing manufacturing processes

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