The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2023

Filed:

Nov. 09, 2020
Applicants:

Ckd Corporation, Aichi, JP;

Ebara Corporation, Tokyo, JP;

Ebara Refrigeration Equipment & Systems Co., Ltd., Tokyo, JP;

Inventors:

Akihiro Ito, Aichi, JP;

Norio Kokubo, Aichi, JP;

Masayuki Kouketsu, Aichi, JP;

Isahiro Hasegawa, Aichi, JP;

Toshiharu Nakazawa, Tokyo, JP;

Keisuke Takanashi, Tokyo, JP;

Yukihiro Fukusumi, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F28F 27/02 (2006.01); F28D 20/00 (2006.01); F28D 20/02 (2006.01); F28D 21/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F28D 20/0039 (2013.01); F28D 20/028 (2013.01); F28F 27/02 (2013.01); F28D 2020/0069 (2013.01); F28D 2020/0078 (2013.01); F28D 2021/0077 (2013.01); H01L 21/67109 (2013.01);
Abstract

A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.


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