Yukichi Koji

Title: Innovations of Yukichi Koji in Etching Solutions

Introduction

Yukichi Koji is a notable inventor based in Tokyo, Japan. He has made significant contributions to the field of microelectronics through his innovative etching solutions. With a total of 5 patents to his name, his work has had a considerable impact on the industry.

Latest Patents

One of his latest patents is an etching solution for copper or copper alloy. This solution is designed for selectively etching copper or a copper alloy from a microelectronic device that simultaneously includes nickel-containing material. The solution comprises a chelating agent with an acid group, hydrogen peroxide, and a surfactant with an oxyethylene chain. Another significant patent is an etching agent for copper or copper alloy. The objective of this invention is to provide an etching solution that generates less foam while achieving high selectivity in etching copper or copper alloy in electronic substrates containing both materials. This solution includes essential components such as a linear alkanolamine, a chelating agent with an acid group, and hydrogen peroxide.

Career Highlights

Yukichi Koji has worked with several prominent companies in the field, including Advanced Technology Materials, Inc. and Entegris, Inc. His experience in these organizations has allowed him to refine his expertise in developing innovative etching solutions.

Collaborations

Throughout his career, Yukichi has collaborated with talented individuals such as Mutsumi Nakanishi and Hiroshi Yoshimochi. These collaborations have contributed to the advancement of his research and the successful development of his patents.

Conclusion

Yukichi Koji's contributions to the field of microelectronics through his innovative etching solutions demonstrate his expertise and commitment to advancing technology. His patents reflect a deep understanding of the complexities involved in etching processes, making him a significant figure in the industry.