Yuki Tanaka

Title: Yuki Tanaka: Innovator in Plasma Technology

Introduction

Yuki Tanaka is a prominent inventor based in Yamanashi, Japan. She has made significant contributions to the field of plasma technology, particularly through her innovative designs and methods. Her work has garnered attention for its potential applications in various industries.

Latest Patents

Yuki Tanaka holds 1 patent for her invention titled "Plasma generating apparatus, plasma processing apparatus, and plasma processing method." This patent describes a plasma generating apparatus that includes an electrode pair consisting of a first plasma electrode and a second plasma electrode arranged to face each other. The apparatus is equipped with an RF power supply that delivers RF power to the electrode pair, along with a matching unit positioned between the RF power supply and the electrode pair. The matching unit features a first variable capacitor and a second variable capacitor connected in parallel with respect to a load between the electrode pair, a coil connected in series with the first plasma electrode, and a capacitor connected in series with the second plasma electrode.

Career Highlights

Yuki Tanaka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. Her role involves developing advanced plasma processing technologies that are crucial for the production of semiconductor devices.

Collaborations

Yuki has collaborated with notable colleagues, including Takeshi Kobayashi and Takeshi Ando, to further enhance her research and development efforts in plasma technology.

Conclusion

Yuki Tanaka's innovative work in plasma technology exemplifies her commitment to advancing the field. Her contributions, particularly through her patented inventions, highlight her role as a key player in the industry.