Kawasaki, Japan

Yuka Hayami


Average Co-Inventor Count = 3.4

ph-index = 4

Forward Citations = 34(Granted Patents)


Location History:

  • Hamura, JP (2007)
  • Kawasaki, JP (1995 - 2008)

Company Filing History:


Years Active: 1995-2008

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6 patents (USPTO):Explore Patents

Title: Yuka Hayami: Innovator in Semiconductor Technology

Introduction

Yuka Hayami is a prominent inventor based in Kawasaki, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. Her work focuses on innovative methods and devices that enhance the performance and reliability of semiconductor components.

Latest Patents

One of her latest patents is for a semiconductor device and method for fabricating the same. This semiconductor device comprises a silicon wafer, a multilayer interconnection buried in an inter-layer insulation film formed on the upper surface of the silicon wafer, and a silicon nitride film on the back surface of the silicon wafer. The silicon nitride film serves as an insulation film with tensile stress, which helps to relax the stress exerted on the silicon wafer by the inter-layer insulation films. Another notable patent is for a method of manufacturing a silicide layer. This method involves removing an organic substance from a semiconductor surface with an oxide film, followed by the removal of the oxide film and drying the semiconductor surface without using an organic solvent. Finally, a silicide layer is formed on the dried semiconductor surface.

Career Highlights

Yuka Hayami is currently employed at Fujitsu Corporation, where she continues to push the boundaries of semiconductor technology. Her innovative approaches have garnered attention in the industry, contributing to advancements in electronic devices.

Collaborations

Yuka has collaborated with notable colleagues, including Masanori Kobayashi and Ken Yamazaki. Their teamwork has fostered a creative environment that encourages the development of groundbreaking technologies.

Conclusion

Yuka Hayami's contributions to semiconductor technology exemplify her dedication to innovation and excellence. Her patents reflect her expertise and commitment to advancing the field, making her a significant figure in the world of technology.

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