The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2008
Filed:
Oct. 27, 2004
Applicants:
Takashi Saiki, Kawasaki, JP;
Katsuaki Okoshi, Kawasaki, JP;
Yuka Hayami, Kawasaki, JP;
Inventors:
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/72 (2006.01);
U.S. Cl.
CPC ...
Abstract
The semiconductor device comprises a silicon wafer, a multilayer interconnectionburied in inter-layer insulation film formed on the upper surface of the silicon wafer, and a silicon nitride filmwhich is formed on the back surface of the silicon waferand is an insulation film having a tensile stress, relaxing a stress exerted to the silicon waferby the inter-layer insulation films in which the multilayer interconnectionis buried.