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Wilmington, MA, United States of America

Yuji Tsukamoto

USPTO Granted Patents = 10

Average Co-Inventor Count = 1.6

ph-index = 7

Forward Citations = 801(Granted Patents)

Company Filing History:

10 out of 10,295

Tokyo Electron Limited

Years Active: 2007-2013

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10 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 8450657 - Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system (2013-05-28),

2. 8207476 - Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system (2012-06-26),

3. 8057633 - Post-etch treatment system for removing residue on a substrate (2011-11-15),

4. 8034176 - Gas distribution system for a post-etch treatment system (2011-10-11),

5. 7952049 - Method for multi-step temperature control of a substrate (2011-05-31),

6. 7838800 - Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system (2010-11-23),

7. 7723648 - Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system (2010-05-25),

8. 7297894 - Method for multi-step temperature control of a substrate (2007-11-20),

9. 7230204 - Method and system for temperature control of a substrate (2007-06-12),

10. 7164236 - Method and apparatus for improved plasma processing uniformity (2007-01-16),

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