Yuji Tsukada

Title: Innovations of Yuji Tsukada

Introduction

Yuji Tsukada is a prominent inventor based in Gunma, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on enhancing the performance and reliability of semiconductor devices.

Latest Patents

One of his latest patents is a semiconductor device with a passivation layer covering the wiring layer. This invention provides a semiconductor device with a bonding pad made of a wiring layer that includes aluminum, along with a manufacturing method that enhances the yield of the semiconductor device. The method involves removing a portion of an antireflection layer formed on the uppermost second wiring layer by etching, forming a passivation layer that covers the antireflection layer and a portion of the second wiring layer, and dividing the semiconductor substrate into multiple semiconductor dice. These processes prevent the antireflection layer from being exposed, thus avoiding elution of components from the second wiring layer due to cell reactions.

Another notable patent is a method of manufacturing a semiconductor device with a capacitor and a transistor. This invention aims to prevent dielectric breakdown of a capacitor in a semiconductor device that has both a capacitor and a MOS transistor formed on the same substrate. A SiO film is formed on the surface of a P-type semiconductor substrate, and a photoresist layer is selectively applied in the high voltage MOS transistor formation region. The SiO film is then removed by etching, ensuring that the edges of the trench isolation films adjacent to the capacitor are not cut too deep. This process results in a capacitor insulation film that enhances device reliability.

Career Highlights

Yuji Tsukada is currently employed at Sanyo Electric Co., Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor devices, making them more efficient and reliable.

Collaborations

He has collaborated with notable coworkers, including Takuya Suzuki and Yumiko Akaishi, contributing to various projects that enhance semiconductor technology.

Conclusion

Yuji Tsukada's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the field. His work continues to influence the development of reliable and efficient semiconductor devices.