Nirasaki, Japan

Yuji Obata

USPTO Granted Patents = 3 

Average Co-Inventor Count = 1.8

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2015-2025

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3 patents (USPTO):Explore Patents

Title: Innovator Spotlight: Yuji Obata

Introduction: Yuji Obata is a notable inventor based in Nirasaki, Japan. With a focus on cutting-edge technology, he has contributed significantly to the field with his innovative patents. Yuji works at Tokyo Electron Limited, where he collaborates with other talented professionals to advance research and development.

Latest Patents: Yuji Obata holds two patents that showcase his expertise in gas processing and microwave technology. The first patent is for a **Gas Supply Apparatus** and **Gas Supply Method**, designed for efficiently supplying gas to a processing space where substrate processing occurs. This apparatus includes a gas supply source, a gas supply path, and an opening/closing valve, among other components. It features a detection system to maintain gas flow within appropriate parameters, illustrating Yuji's attention to precision engineering.

The second patent is for a **Microwave Irradiation Apparatus**, which allows precise temperature control of a target object while subjecting it to microwave radiation. This apparatus comprises a processing chamber, a supporting table, and advanced temperature control mechanisms. The design enables independent temperature management, enhancing the efficacy of processing operations.

Career Highlights: Over his career, Yuji Obata has established himself as a key figure in the field of innovation within Tokyo Electron Limited. His work emphasizes the synergy between practical application and technological advancement, allowing for optimized solutions in various industrial processes. His inventions contribute to the efficiency and effectiveness of gas processing and microwave technology.

Collaborations: Throughout his career, Yuji has collaborated with prominent professionals, including Shigeru Kasai and Ryoji Yamazaki. These partnerships leverage diverse expertise, fostering an innovative environment that drives technological development within their projects.

Conclusion: Yuji Obata stands out as a remarkable inventor whose contributions to the field of gas supply and microwave irradiation technology exemplify innovation and forward-thinking. His patents reflect a commitment to enhancing industrial processes, which continues to inspire future advancements in technology.

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