The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Feb. 17, 2012
Shigeru Kasai, Nirasaki, JP;
Ryoji Yamazaki, Nirasaki, JP;
Mitsutoshi Ashida, Nirasaki, JP;
Yuji Obata, Nirasaki, JP;
Sumi Tanaka, Nirasaki, JP;
Shigeru Kasai, Nirasaki, JP;
Ryoji Yamazaki, Nirasaki, JP;
Mitsutoshi Ashida, Nirasaki, JP;
Yuji Obata, Nirasaki, JP;
Sumi Tanaka, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
There is provided a microwave irradiation apparatus capable of independently controlling a temperature of a target object while irradiating microwave to the target object. The microwave irradiation apparatusincludes a processing chamberconfigured to be vacuum-evacuated; a supporting tableconfigured to support the target object; a processing gas introduction unitconfigured to introduce a processing gas into the processing chamber; a microwave introduction unitconfigured to introduce the microwave into the processing chamber; a heating unitconfigured to heat the target object; a gas cooling unitconfigured to cool the target object by a cooling gas; a radiation thermometerconfigured to measure a temperature of the target object; and a temperature control unitconfigured to adjust the temperature of the target object by controlling the heating unit and the gas cooling unit based on the temperature measured by the radiation thermometer.